Target Assemblies

Multiple target assembly;

Enables the deposition of multi layers without breaking vacuum

Features

  • To purchase in conjunction with the Remote Plasma Source
  • One power supply for multiple targets – cost saving
  • Indexable - software control


Specifications


  • 2”, 3”, 4”, 6” target options available
  • Up to 8 targets per assembly (depending on target size) within a single chamber
  • Compatible with RF and pDC bias (switchable)
  • Water cooled assembly


All specifications can be customised – please contact us

Ordering Information


SKU

Description

Price

4TA

4 off 4” target assembly

POA

6TA

4 off 6” target assembly

POA