Microelectromechanical (MEMS) Devices

Plasma Quest have direct experience in:

Depositing conformal coverage  coatings for inkjet printer heads

Achieving piezoelectric properties (depositing c-axis oriented ZnO)


Some examples of MEMS devices include:


  • Accelerometers for airbag sensors
  • Inkjet printer heads
  • Computer disk drive heads
  • Projection display chips
  • Blood pressure sensors
  • Optical switches
  • Microvalves
  • Biosensor


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