Plasma Quest’s remote plasma technology enables the deposition of world leading transparent conducting oxides (TCOs) at low temperature, enabling deposition onto a wide range of flexible substrates.

Benefits include:

• Low temperature deposition process
• Resistivities lower than 4.0 x 10^-4 Ωcm achievable
• Peak transmission of 98 % with sheet resistance of 10 Ω/□
• Deposition rates up to 90 nm/min from a 4” target
• Diverse coating properties achievable e.g. amorphous through to crystalline
• Plasma treatment developed during the InREP project enabled ohmic contact of AZO to doped GaN

Applications:

• Photovoltaics
• Flat panel displays
• Mobile phones
• Flexible applications (Low temperature process)

TCO Materials:

• Indium Tin Oxide (ITO)
• Aluminium-doped Zinc Oxide (AZO)
• Indium doped Zinc Oxide (IZO)
• Zinc Oxide (ZnO)

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