Displays and Flexible Electronics
Plasma Quest’s remote plasma technology enables world leading properties deposited at low temperature, enabling deposition on to flexible substrates.
- High deposition rate dielectrics (alumina 100 nm/min)
- High Transmission: 100 % peak
- Hafnia (HfO2) High dielectric constant, k~30
- Low stress (< 100 MPa)
- Low film roughness < 0.5 nm
- Maximum temp < 50 °C
- Al2O3 Breakdown voltage > 6.0 MV/cm
