Substrate Assemblies

Multi-Functional Substrate Assemblies

Features

  • Compatible with most deposition systems
  • Compatible with loading arms
  • Substrate sizes up to 200 mm (SEMI standard)
  • Automatic shutter for accurate run to run reproducibility
  • Substrate bias compatible  – for conformal coverage of uneven surfaces
  • Substrate rotation to 60 rpm – For good uniformity
  • Cooling and heating options available

Specifications


  • Substrate sizes 1" up to 8" (200 mm) (SEMI standard)
  • Compatible with RF and pDC bias
  • Adjustable deposition height (Z shift)
  • Substrate lift/lower for transfer


All specifications can be customised – please contact us

Ordering Information


SKU

Description

Price

RSC1

1” substrate assembly

POA

RSC2

2” substrate assembly

POA

RSC4

4” substrate assembly

POA

RSC6

6” substrate assembly

POA

RSC8

8” substrate assembly

POA