Magnetron Source
Standalone magnetron sources
Features
- Circular magnetrons – ranging from 2” to 10”
- Choice of magnetic and mechanical options
- Suitable for co-sputtering
Specifications
- Tilting shaft mount
- Automatic shutter option available
- Compatible with RF and pDC bias
- Water cooled assembly
All specifications can be customised – please contact us
Ordering Information
SKU | Description | Price |
Mag4 | 4" magnetron target assembly | POA |
Mag6 | 6" magnetron target assembly | POA |