Magnetron Source

Standalone magnetron sources

Features

  • Circular magnetrons – ranging from 2” to 10”
  • Choice of magnetic and mechanical options
  • Suitable for co-sputtering

Specifications


  • Tilting shaft mount
  • Automatic shutter option available
  • Compatible with RF and pDC bias
  • Water cooled assembly


All specifications can be customised – please contact us

Ordering Information


SKU

Description

Price

Mag4

4" magnetron target assembly

POA

Mag6

6" magnetron target assembly

POA